This paper primarily introduce a sort of structure of novel optical exposure systerm and detailedly discuss the optical structure, principle, character as well as the pivotal technology of optical systerm, and give the chart of optical systerm and the testing result of illumination uniformity 主要介绍了一种结构新颖的光学曝光系统,对光路的结构、原理、特点以及关键技术作了详细的论述,并给出了光路系统图和照明均匀性的测试结果